Table of Contents

Main

Introduction

The intention of this Learning Center Section is to provide the reader with the tools and guides to determine which Electron Gun Beam System would provide the specifications and functions needed for your application.  It may be helpful if the reader first goes through the Electron Gun Beam System Tutorial to become familiar with the basic principles and terminology.

The first section below, the Electron Gun Beam Selection Guide, provides an Interactive “MindMap” roadmap to finding the best system for your application in our portfolio of Electron Gun Beam Systems.  It can be expanded / contracted to guides the user through the process of selecting a system by providing a sequence of topics that include the application, major system specifications, with then further detailed information to determine what other features and options may be needed.

The Electron Gun Beam System Application Table Matrix section allows the reader who already knows what their specific application and specifications are to efficiently  look through our selection of electron gun beam systems.

The next section of Electron Gun Beam System Energy Comparison Tables divides the our Electron Gun Beam System selections into Low, Medium and High Energy selections and then provides other associated information such as beam current ranges, spot size ranges, and working distance to help determine which system and features would be optimal for your application.

In the  Electron Gun Beam Systems Cathodes / Electron Emitters we provide a summary of the characteristic of cathodes that are available for use in our Electron Gun Beam System. Please note that several factors determine which cathodes are available in a particular system (not all cathodes are available for all systems).

In the Descriptions Features, Options, Customizations section, we provide descriptions of the various capabilities available for the Electron Gun Beam Systems.

The final section provides a list of Electron Gun Beam System Tier System Features found in our pre-configured Tier Systems, with comparison tables to further show how the features are grouped into packages.  A list of addition customizations that may be available is also provided.

If your application is significantly different or would be a custom application using our Electron Gun Beam Systems and Optics, please reach out to Kimball Physics to speak directly with our Physicists and/or Engineers to see what may be possible with our advanced technology.

PLEASE DOWNLOAD our Electron Beam System Selection Guide:  Summary Form PDF document to assist you in summarizing your research looking for the Electron Gun Beam System for your application.

Electron Gun Beam System Selection Guide 

The Electron Gun Beam Selection Guide, provides a flow path to finding the best system in our portfolio of Electron Gun Beam Systems.  It provides a “flow path” to answering a sequence of questions that include Application, major system specifications, and then determining other necessary features and options.

Procedure

  1. Enlarge (zoom) the window to make the overall map of information more readable (Adjust lower right to about 100 %).  You can navigate around the map with the scrolls bars along the bottom and side of the window. If you want the window full page, click the icon with the lower right menu area (looks like a box with an upward pointing arrow. The mind map in its own browser window tab.
  2. Start at the top of the open nodes.  The tree of nodes can be opened and closed to expand or contract the information (look for the icon at the end of the text node).  Links are typically available at the end of the nodal path (within the node- upper right arrow) to move to more specific and detailed information.

 

Electron Gun (Beam) System Application Matrix:

This tool provides a efficient path to find your own existing application and quickly find the Electron Gun Beam System with the needed specifications.  The table provides tooltips with quick access to the Electron Gun Specs, the respective product page, and a PDF document with more in depth information about the system.

The Red Circles in the Matrix Table suggest which Electron Gun (Beam) System may be suitable for a particular application.

Procedure:

  • Choose your Application in the Left Column
  • Scan across the Application Row and find the circles that identify which Electron Gun (Beam) System (Listed along top of table) would be indicated
  • Select/Click the Column to see a Snapshot of the Product Features and Specs (Product Page and Product Document Links included)
  • Scan to the Top Row (Product Names) and Click to access the Product Page
  • Scan to the Bottom Row and Click to access Product Document (PDF)
Application Table Electron Gun Systems: Matrix with list of various applications verse the electron gun beam system that should be considered. Applications include: Beta Decay Simulation, Biologic Specimen Radiation, Charge Neutralization, Electron Diffraction, Electron Stimulated Desorption, Fluorescence Experiments, Gas Electron Fluorescence, Heating / Melting / Welding, Inverse Photoelectron Emission, Ionization Experiments, MBE RHEED Studies, Neutral Beam Excitation, Phosphor Testing, Plasma Excitation, Radiation Studies, Semiconductor Processing /Research, Space Physics Studies, Spacecraft Charge Up Studies, Spacecraft Materials Testing, Spacecraft Testing, Specimen Heating, Surface Bombardment, Surface Charging Studies, Surface Excitation /Heating, Surface Physics Studies, Surface Scrubbing, UHV Charging, UHV Surface Physics, Vacuum Physics Experiments, X-ray Generation/Production
FRA-2X1-2 / EGPS-1011: Product Page FRA-2x1-2 / EGPS-1011: Product Document (PDF) FRA-2X1-2 / EGPS-1011: Features and Specs ELG-2 / EGPS-1022: Product Page ELG-2 /EGPS-1022: Product Document (PDF) EGA-1012 / EGPS-1012: Product Page EGA-1012 / EGPS-1012: Product Document (PDF) EFG-7 / EGPS-1017: Product Page EFG-7 / EGPS-1017: Product Document (PDF) EFG-7 / EGPS-2017: Product Page EFG-7 / EGPS-2017: Product Document (PDF) EGL-2022 / EGPS-2022: Product Page EGL-2022 / EGPS-2022: Product Document (PDF) EGG-3101 / EGPS_3101: Product Page EGG-3101 / EGPS_3101: Product Document (PDF) EGG-3103 / EGPS-3103: Product Page EGG-3103 / EGPS-3103: Product Document (PDF) EGF-3104 / EGF-3104: Product Page EGF-3104 / EGF-3104: Product Document (PDF) EMG-4212 / EGPS-3212: Product Page EMG-4212 / EGPS-3212: Product Document (PDF) EMG-4212 / EGPS-4212: Product Page EMG-4212 / EGPS-4212: Product Document (PDF) EMG-4215 / EGPS-4215: Product Page EMG-4215 / EGPS-4215: Product Document (PDF) EGF-4104 / EGPS-4104: Product Page EGF-4104 / EGPS-4104: Product Document (PDF) EMG-4210 / EGPS-4210: Product Page EMG-4210 / EGPS-4210: Product Document (PDF) EMG-4193 / EGPS-4193: Product Page EMG-4193 / EGPS-4193: Product Document (PDF) EGH-6210 / EGPS-6210: Product Page EGH-6210 / EGPS-6210: Document (PDF) EGH-6002 / EGPS-6002: Product Page EGH-6002 / EGPS-6002: Product Document (PDF) EGF-6104 / EGPS-6104: Product Page EGF-6104 / EGPS-6104: Product Document (PDF) EGH-8100 / EGPS-8100: Product Page EGH-8100 / EGPS-8100: Product Document (PDF) EGH-8105 / EGPS-8105: Product Page EGH-8105 / EGPS-8105: Product Document (PDF) EGH-8103 / EGPS-8103: Product Page EGH-8103 / EGPS-8103: Product Document (PDF) EGH-8201/ EGPS-8201: Product Page EGH-8201/ EGPS-8201: Product Document (PDF) ELG-2 / EGPS-1022: Features and Specs EGA-1012 / EGPS-1012: Features and Specs EFG-7 / EGPS-1017: Features and Specs EFG-7 / EGPS-2017: Features and Specs EGL-2022 / EGPS-2022: Features and Specs EGG-3101 / EGPS-3101: Features and Specs EGG-3103 / EGPS-3103: Features and Specs EGF-3104 / EGF-3104: Features and Specs EMG-4212 / EGPS-3212: Features and Specs EMG-4212 / EGPS-4212: Features and Specs EMG-4215 / EGPS-4215: Features and Specs EGF-4104 / EGPS-4104: Features and Specs EMG-4210 / EGPS-4210: Features and Specs EMG-4193 / EGPS-4193: Features and Specs EGH-6210 / EGPS-6210: Features and Specs EGH-6002 / EGPS-6002: Features and Specs EGF-6104 / EGPS-6104: Features and Specs EGH-8100 / EGPS-8100: Features and Specs EGH-8105 / EGPS-8105: Features and Specs EGH-8103 / EGPS-8103: Features and Specs EGH-8201 / EGPS-8201: Features and Specs

 

Electron Gun Beam Systems Organized by Electron Energy (keV)

Kimball Physics products have evolved into a broad range of electron beam systems that we arbitrarily characterized as low energy (up to 5 keV), medium (up to 30 keV) and high (up to 100 keV) energy systems. Many of the systems were born from custom projects, which still is a large portion of our focus.

Low Energy Systems

Low Energy Systems, with energy ranges from 1 eV up to  5 keV, currents ranging from 1 nA to 2 mA, and spot sizes from 0.5 mm  to 100 mm are available.

The tables below provide comparison of the Electron Gun System specifications and the typical Applications and Features for each Low Energy Electron Gun System.

Low Energy Electron Gun Systems (<5 keV)

 

Medium Energy Systems

Medium Energy Systems, with energy ranges from 100 eV up to  30 keV, currents ranging from 1 nA to 5 mA, and spot sizes of 60 microns to 450 mm are available.

The tables below provide comparison of the Electron Gun System specifications and the typical Applications and Features for each Medium Energy Electron Gun System.

Medium Energy Electron Gun Systems (<30 keV)

 

High Energy Systems

High Energy Systems, with energy ranges from 1 keV up to  100 keV, currents ranging from 1 nA to 2 mA, and spot sizes from 50 micron  to 500 mm are available.

The tables below provide comparison of the Electron Gun System specifications and the typical Applications and Features for each High Energy Electron Gun System.

High Energy Electron Gun Systems (< 100 keV)

Electron Gun Beam Systems Cathodes / Electron Emitters

Kimball Physics designs and manufactures a broad range of high performance electron emitters to meet the diverse needs of our customers. Designed for high brightness, long life, or rugged reliability, these emitters  are used in Kimball Physics electron guns  and the high performance  instruments and tools of our customers. Cathodes/emitters are available as both standard products and custom designs, and applications include electron microscopy, lithography, x-ray generation, free electron lasers, electron accelerators, and more.

Not all cathodes are available for all Electron Gun Beam Systems. The selection of the cathode is based on several parameters such as expected vacuum conditions, energy spread, emission current and density, and brightness requirements. The chart below provides insight into the features of each of the cathode type available at Kimball Physics for use in our Electron Gun Beam Systems.

 

LaB6 Tantalum Barium Oxide Yttria

 

Description of Features, Options, Customizations

Description Features, Options, Customizations

Kimball Physics Electron Gun /Beam Systems typically come as a complete system, and include

  • a Ultra-High Vacuum (UHV) compatible electron gun that can be mounted to your vacuum system
  • an electron emitter (cathode) – often several options are available depending on your application
  • a dedicated electron gun power supply (EGPS) that includes  high energy (voltage), cathodes currents, grid voltages and more
  • Electron Gun System Control Software providing a detailed graphic user interface and controls

Several of the features listed below may be included in a pre-configured Tier Level systems or packages for a particular electron gun system.  Addition features, depending on the system, may be available as options / add-ons / customizations that can be included in systems for additional cost.  These features include:

  • Pulsing
  • Blanking
  • Various Emission Levels
  • High Current
  • Small Spot Size
  • Raster Generation
  • Faraday Cups and Actuators
  • Deflection (Electrostatic and Magnetostatic) and Focusing (Magnetostatic)
  • Advanced  Control Software
  • Replaceable (Spare) Firing Unit

Pulsing

Dual Grid Pulsing: This option adds an additional, fixed voltage power supply in series with the variable grid supply which can be activated via an integrated TTL circuit. This option adds a standard BNC connection on the rear panel for TTL signal input. Used to completely cutoff emission from the cathode surface. Not usable simultaneously with emission current control (ECC). Feature requires external pulse generator. TTL pulse width 2us to DC, frequency up to 5 kHz. 500 ns rise/fall time.

*Software generated TTL signal available with appropriate software options and hardware

Pulsing, Capacitive: Both variable grid and blanker pulsing can be operated using a capacitive pulse junction box, which combines additively the output from the EGPS and an external high voltage (HV) signal generator. This option allows for shorter pulse width (20 ns to 100 us) with a ~10 ns rise/fall time. Frequency is power and duty cycle limited, see system manual for more details.

*Note: Capacitive Grid Pulsing is standard on all mounted ELG-2 systems*

To LEARN more about pulsing, please visit Beam Pulsing in the Beam Operation section of the Electron Gun Tutorial in the Learning Center.

Blanking

Beam Blanking: Adds a copper beam blanking aperture in the optics column before the focus element. Applying a voltage to the aperture shunts the electron beam into a trap, effectively stopping emission from the end of the gun. Voltage is supplied by a variable power supply within the EGPS which can be toggled on/off via TTL input. This option adds a standard BNC connection on the rear panel for TTL signal input. Can be used simultaneously with ECC. Requires external pulse generator. TTL pulse width 1us to DC, frequency up to 5 kHz. 500 n/s rise/fall time.

*Software generated TTL signal available with appropriate software options

Beam Blanking, High Current: For systems with both high current and beam blanking options available, the blanking aperture is modified to account for higher current and different electrode geometry. Provides all the same functionality as standard beam blanking.

Emission High/Low

Adds a second metering circuit to the EGPS for the purpose of higher resolution metering and control with a lower maximum emission value. The circuits can be switched between using a TTL switch embedded in the EGPS unit either through the front panel, software, or the rear panel analog input. The Low range offers a factor of 10 greater resolution at up to 10% the maximum emission current of the High range (e.g., 3.000 mA / 300.0 uA).

Energy High/Low

Adds a second metering circuit to the EGPS for the purpose of higher resolution metering and control with a lower maximum energy value. The circuits can be switched between using a TTL switch embedded in the EGPS unit either through the front panel, software, or the rear panel analog input. The Low range offers a factor of 10 greater resolution at up to 10% the maximum energy of the High range (e.g., 2000.0 eV / 200.00 eV).

High Current

Replaces the standard firing unit in the electron gun system with a higher current firing unit. In the cases of disc emitters, this typically involves increasing the diameter of the emitter surface, though in some cases cathode material may change. Please see option details on each system for more information.

Small Spot Size

Replaces the standard firing unit in the electron gun system with a firing unit optimized for smaller spots. Generally, this involves replacing the cathode with a precision micro-flat LaB6 cathode, though some systems may differ. Please see option details on each system for more information.

Optional Cathodes

Some gun systems offer multiple cathode material options without significantly changing gun performance. To LEARN more about cathodes, please visit our Cathodes Product Page or visit our Learning Center.  Also, please contact Kimball Physics if you need assistance determining which cathode option is best suited to your application.

Raster

Raster Generation: Adds the ability to rapidly move the beam along the two deflection axes of the gun system by ramping the voltages or currents of the deflection elements at user set frequencies. User can also set the center and relative amplitude of the raster pattern. Each axis can be adjusted independently. Available through two options:

  • Internal: A hardware signal generator is installed into the EGPS. This is fully controllable just as any other channel of the EGPS. Cannot generate custom waveforms; only the offset, amplitude and frequency of the sawtooth waveforms can be changed.
  • External: The National Instruments NI-6353 USB DAQ module is used to generate the raster signal from software input. This module is compatible with Kimball Physics LabView software and with user written scripts allowing for customizable raster patterns.

To LEARN more about rastering, please visit Deflection / Rastering the Electron Gun Tutorial found in the Learning Center.

Beam Washing

Functionally identical to raster generation, though using magnetic deflection instead of electrostatic. Same options apply.

Faraday Cup

Adds a small faraday cup to the mouth of the electron gun as well as a BNC connector on the mounting flange to read out current. Power input limit 2W. Increases in vacuum clearance requirements.

  • Manual: The faraday cup is attached to a manual actuator and must be moved out of the beam path directly.
  • Pneumatic: The faraday cup is attached to a pneumatic actuator which can be controlled more remotely.

To LEARN more about Faraday cups, please visit the Faraday Cup Product page or our Learning Center.

Electron Optics: Deflection and Focus

Several electrostatic and magnetostatic options are available for defection and focus capabilities, including electrostatic deflection, 2 and 4 pole magnetostatic deflection, two pole magnetostatic deflection and focusing, and four pole magnetostatic deflection and focusing.

For more information about electron beam focus an deflection, please visit the Electron Optics in the Electron Gun Tutorial in the Learning Center..

Electron Gun System Control Software

The basic Kimball Physics software package offers all the front panel functionality from a virtual instrument on the user’s computer. System control is executed through simple serial commands.

Replaceable (Spare) Firing Unit

For Electron Guns: The firing unit is the assembly component of the electron gun that emits the electrons; the assembly that can be replaced as a unit, usually consisting of the complete triode (cathode, grid (Wehnelt) and anode) or just the cathode and grid; in some guns, only a part of the firing unit called the firing unit cartridge needs to be replaced. In some systems, it is possible for customers with technical capability to replace the firing unit.

Tier Package Feature Comparison Tables

Tier System Packages

A list of the Features available in the Electron Gun Beam System Tier Packages, and addition customizations available for Customized Systems, are provided below.

Tables then follow to provide easy comparison of features in the various pre-configured System Tier Packages. The Tables are grouped by Low, Medium and High Energy Systems. 

 

Tier System Features /Options 

  • DR-E – Dual-range Energy (Alternative names: Energy High/Low, Energy High-Low Range)
  • DR-i – Dual-range Emission (Alternative names: Emission High/Low, Emission High-Low Range)
  • DR-E/i – Dual-range Energy and Dual-range Emission
  • Defl – Electrostatic Deflection
  • Mag Defl (x2) – 2-Pole Magnetostatic Deflection (Alternative names: 2-Pole Magnetic Deflection)
  • Mag Defl (x4) – 4-Pole Magnetostatic Deflection (Alternative names: 4-Pole Magnetic Deflection)
  • Mag Defl (x2)/Lens – 2-Pole Magnetostatic Deflection and Magnetostatic Focusing – same connector. (Alternative names: 2-Pole Magnetic Deflection and Magnetic Lens)
  • Mag Defl (x4)/Lens – 4-Pole Magnetostatic Deflection and Magnetostatic Focusing – same connector. (Alternative names: 4-Pole Magnetic Deflection and Magnetic Lens)
  • Mag Defl (x2) & Lens – 2-Pole Magnetostatic Deflection and Magnetostatic Focusing (separate connectors)
  • Mag Defl (x4) & Lens – 4-Pole Magnetostatic Deflection and Magnetostatic Focusing (separate connectors)
  • Raster – Internal Raster (Alternative names: Internal Rastering; Previous names: Hardware Raster, Hardware Rastering
  • Note: This option is currently not available due to parts shortages.
  • GP – Dual-grid Pulsing (Alternative names: Grid Pulsing, Grid Pulser)
  • BB – Beam Blanking. (Alternative names: Beam Blanker)
  • HC – High Current
  • CP – Capacitive Pulsing. (Alternative names: Capacitive Pulsing Capability with Pulse Junction Box)
  • Demountable – Demountable

Other Customizations (Limited availability based on Electron Gun System. Additional Engineering fees apply.)

  • Small Spot Option (LaB6, 10-7  torr or better)
  • Port Aligner (+/- 2 degrees)
  • Beam Washing (Hardware, Software)
  • Beam Shaping (not compatible with beam washing)
  • Actuated Faraday Cup (mounted on housing)
  • FC 2×1 Manual Rotary Faraday Cup
  • FC-2/PA-200 Pneumatically Actuated Faraday Cup [mounted on housing]
  • Software /DAQ Raster Generator

 

Low Energy Systems

Low Energy Electron Guns Table with Features in various Tier Packages

Low Energy Electron Guns Table with Features in various Tier Packages

 

Medium Energy Systems

Low Energy Electron Guns Table with Features in various Tier Packages

Low Energy Electron Guns Table with Features in various Tier Packages

 

High Energy Systems

Low Energy Electron Guns Table with Features in various Tier Packages

Low Energy Electron Guns Table with Features in various Tier Packages

 

References

 Electron Beam System Selection Guide:  Summary Form PDF document to summarize your research looking for the Electron Gun Beam System for your application.

Tutorials and Overviews

Electron Gun (Beam) Systems

Electron Gun (Beam) Systems Product Documents (PDF) 

Select PDF Document(s) below:

Low Energy Systems (<5 keV)

EFG-7 / EGPS-1017 EFG-7 / EGPS-2017 EGA-1012 / EGPS-1012
EGL-2022 / EGPS 2022 ELG-2 / EGPS-1022 FRA-2X1-2 / EGPS-1011

 

Medium Energy Systems (<30 keV)

EGG-3101 / EGPS-3101 EGG-3103 / EGPS-3103 EGF-3104 / EGPS-3104
EMG-4212 / EGPS-3212 EMG-4212 / EGPS-4212 EMG-4215 / EGPS-4215
EGF-4104 / EGPS-4104 EMG-4210 / EGPS-4210 EMG-4193 / EGPS-4193

 

High Energy Systems (< 100 keV)

EGH-6210 / EGPS-6210 EGH-6002 / EGPS-6002 EGF-6104 / EGPS-6104
EGF-6115 / EGPS-6115  (Please see EGF-6104) EGH-8100 / EGPS-8100 EGH-8105 / EGPS-8105
EGH-8103 / EGPS-8103 EGH-8201 / EGPS-8201

 

Notes:

  1. Charts /graphs show typical performance, data is for guidance only
  2. It is not necessarily possible to achieve all maximum specifications simultaneously.
  3. Specifications Subject to Change Without Notice
  4. May not be up-to-date, with some systems no longer available.
  5. DE Altobelli, 2/19/2025

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