Electron Gun Beam Systems: Selection Guide

Under Construction

Introduction

Electron Gun Beam System Selection Guide- Mind Map
Electron Gun Beam System Application Matrix
Electron Gun Beam System Energy Comparison Tables
Low Energy Systems
Medium Energy Systems
High Energy Systems
Electron Gun Beam Systems Cathodes / Electron Emitters
References

Main

Introduction

The intention of this Learning Center Section is to provide the reader with the tools and guides to determine which Electron Gun Beam System would provide the specifications and functions needed for your application. It may be helpful if the reader first goes through the Electron Gun Beam System Tutorial to become familiar with the basic principles and terminology.

The first section below, the Electron Gun Beam Selection Guide, provides a roadmap to finding the best system for your application in our portfolio of Electron Gun Beam Systems. It guides the user by answering a sequence of questions that include application, major system specifications, and then determining other necessary features and options.

The Electron Gun Beam System Application Table Matrix section allows the reader who already knows what their specific application and specifications are to efficiently look through our selection of electron gun beam systems.

The next section of Electron Gun Beam System Energy Comparison Tables divides the our Electron Gun Beam System selections into High, Medium and Lower energy selections and then provide other associated information such as beam current ranges, spot size ranges, and working distance to then quickly determine which system and features would be optimal for your application.

In the final section, Electron Gun Beam Systems Cathodes / Electron Emitters we provide a summary of the characteristic of cathodes that are available for use in our Electron Gun Beam System. Please note that several factors determine which cathodes are available in a particular system (not all cathodes are available for all systems).

If your application is significantly different or would be a custom application using our Electron Gun Beam Systems and Optics, please reach out to Kimball Physics to speak directly with our Physicists and/or Engineers to see what may be possible with our advanced technology.

Please download our Electron Beam System Selection Guide: Summary Form PDF document to summarize your research looking for the Electron Gun Beam System for your application.

Electron Gun Beam System Selection Guide

The Electron Gun Beam Selection Guide, provides a flow path to finding the best system in our portfolio of Electron Gun Beam Systems. It provides a “flow path” to answering a sequence of questions that include Application, major system specifications, and then determining other necessary features and options.

Procedure

Enlarge (zoom) the window to make the large amount of information more readable (Adjust lower right to about 100 %). You can navigate around the map with the scrolls bars along the bottom and side of the window. If you want the window full page, click the icon with the lower right menu area (looks like a box with an upward pointing arrow. The mind map in its own browser window tab.
Start at the top of the open nodes. The tree of nodes can be opened and closed to expand or contract the information (look for the icon at the end of the text node). Links are typically available at the end of the nodal path (within the node- upper right arrow) to move to more specific and detailed information.

Electron Gun (Beam) System Application Matrix:

This tool provides a efficient path to find your own existing application and quickly find the Electron Gun Beam System with the needed specifications. The table provides tooltips with quick access to the Electron Gun Specs, the respective product page, and a PDF document with more in depth information about the system.

The Red Circles in the Matrix Table suggest which Electron Gun (Beam) System may be suitable for a particular application.

Procedure:

Choose your Application in the Left Column
Scan across the Application Row and find the circles that identify which Electron Gun (Beam) System (Listed along top of table) would be indicated
Select/Click the Column to see a Snapshot of the Product Features and Specs (Product Page and Product Document Links included)
Scan to the Top Row (Product Names) and Click to access the Product Page
Scan to the Bottom Row and Click to access Product Document (PDF)

Electron Gun Beam Systems Organized by Electron Energy (keV)

Kimball Physics products have evolved into a broad range of electron beam systems that we arbitrarily characterized as low energy (up to 5 keV), medium (up to 30 keV) and high (up to 100 keV) energy systems. Many of the systems were born from custom projects, which still is a large portion of our focus.

Low Energy Systems

Low Energy Systems, with energy ranges from 1 eV up to 5 keV, currents ranging from 1 nA to 2 mA, and spot sizes from 0.5 mm to 100 mm are available.

The tables below provide comparison of the Electron Gun System specifications and the typical Applications and Features for each Low Energy Electron Gun System.

Low Energy Electron Gun Systems (<5 keV)

Low energy systems, with energy ranges from 1 eV up to 5 keV, currents ranging from 1 nA to 2 mA, and spot sizes from 0.5 mm to 100 mm.This comparison table of Kimball Physics Low Energy Electron Gun Systems (< 5 keV) compares the various Kimball Physics High Energy Guns: FRA-2X1-2/ EGPS-1011, ELG-2/EGPS-1022, EGA-1012/ EGPS-1012, EGA-1012, EFG-7/EGPS-1017 (and High Current Option), EFG-7/EGPS-2017, ELG-2022 / EGPS-2022. It compares the systems based on the following parameters: the systems high and low beam energy, high and low beam current, spot size range, the working distance range, and the beam uniformity.

Low energy systems, with energy ranges from 1 eV up to 5 keV, currents ranging from 1 nA to 2 mA, and spot sizes from 0.5 mm to 100 mm. Comparison table of Kimball Physics Low Energy Electron Gun Systems (< 5 keV): FRA-2X1-2, ELG-2, EGA-1012, EFG-7, EGL-2022, and their applications and features. FRA-2X1-2, EGPS-1011: Applications: Charge Neutralization, Surface Physics Studies, Ionization Experiments, Surface Scrubbing. Features: 5 eV to 1000 eV, Wide Angle Low Energy Electron Beam, Medium Currents at Low Energies, Compact Size, Variable Mounting Configuration, Rebuildable Components. ELG-2, EGPS-1022: Applications: Surface Physics Studies, Electron Stimulated Desorption, Inverse Photoelectron Emission, Ionization Experiments, Charge Neutralization. Features:1eV to 2000 eV, Wide Energy Range, Very Low Energies, Constant Beam Current, Constant Spot Size, Zoom Lens Focusing, Demountable Gun, High Speed Pulsing, Deflection, Rastering, Computer/Remote Control. EGA-1012, EGPS-1012: Applications: Charge Neutralization, Surface Physics Studies, Ionization Experiments, Surface Scrubbing, Electron Stimulated Desorption, , Ionization Experiments, Vacuum Physics Experiments, Electron Desorption, Phosphor Testing, Ionization Experiments, Semiconductor Processing. Features: 5 eV to 1000 eV, High Beam Current (up to 2 mA) at Low Energy, Flood Beam (uniform), Feedback stabilized emission current, Low energy, low current beams.

Medium Energy Systems

Medium Energy Systems, with energy ranges from 100 eV up to 30 keV, currents ranging from 1 nA to 5 mA, and spot sizes of 60 microns to 450 mm are available.

The tables below provide comparison of the Electron Gun System specifications and the typical Applications and Features for each Medium Energy Electron Gun System.

Medium Energy Electron Gun Systems (<30 keV)

Medium energy systems, with energy ranges from 100 eV up to 30 keV, currents ranging from 1 nA to 5 mA, and spot sizes of 60 microns to 450 mm are available. This comparison table of Kimball Physics Low Energy Electron Gun Systems (< 30 keV) compares the various Kimball Physics High Energy Guns: EGG-3101 / EGPS-3101, EGG-3103 / EGPS-3103, EGF-3104 / EGPS-3104, EMG-4212 / EGPS-3212, EMG-4212 / EGPS-4212, EMG-4215 / EGPS-4215, EGF-4104 / EGPS-4104, EMG-4210 / EGPS-4210, EMG-4193 / EGPS4193. It compares the systems based on the following parameters: the systems high and low beam energy, high and low beam current, spot size range, the working distance range, and the beam uniformity.

$Comparison table of Kimball Physics Medium Energy Electron Gun Systems (< 5 keV): EGG-3101 / EGPS-3101, EGG-3103 / EGPS-3103, EGF-3104 / EGPS-3104, EMG-4212 / EGPS-3212, EMG-4215 / EGPS-4215, EGF-4104 / EGPS-4104, EMG-4210 / EGPS-4210, EMG-4193 / EGPS-4193, and their applications and features. Medium energy systems, with energy ranges from 100 eV up to 30 keV, currents ranging from 1 nA to 5 mA, and spot sizes of 60 microns to 450 mm are available. EGG-3101 / EGPS-3101: Applications: MBE RHEED Studies, Electron Diffraction, Space Physics Studies, Gas Electron Fluorescence, X-ray Generation, Heating / Melting / Welding, Vacuum Physics Experiments. Features: 1 keV to 30 keV, Small Spot Collimated Beam, New Modular Design, Internal Alignment while operating, Collimated Beam, Small Spot Option down to 100 μm, Higher Current Option up to 1 mA, Electrostatic Focus and Deflection, User Replaceable Firing Units, UHV compatible and bakeable, Computer / Remote Control, Beam Pulsing and Blanking Options. EGG-3103 / EGPS-3103: Applications: , Neutral Beam Excitation, Space Physics Studies, Surface Heating, Surface Excitation, Fluorescence Experiments, Spacecraft Testing, Vacuum Physics Experiments. Features: 100 eV to 10 keV, Beam Currents to 50 mA, Focusing, Deflection and Rastering, 2.75” inch CF Mounting , Computer / Remote Control. EGF-3104 / EGPS-3104: Applications: Spacecraft Charge-up Studies, Surface Charging Studies, Beta Decay Simulation, Surface Physics Studies, Vacuum Physics Experiments. Features: 200 eV to 20 keV, Uniform Flood Electron Beam, Energy Range 200 eV to 20 keV, Beam Currents to 1 mA, Wide Angle Uniform Beam, Divergence Control, Rotatable 2 ¾ CF Mounting, User-replaceable Firing Units, Computer / Remote Control, Custom Apertures. EMG-4212 / EGPS-3212: Applications: MBE RHEED Studies, Electron Diffraction, Space Physics Studies, Gas Electron, Fluorescence, X-ray Generation, Heating / Melting / Welding, Vacuum Physics Experiments. Features: 1 keV to 20 keV, Small Spot Collimated Beam, New Modular Design, Internal Alignment while operating, Collimated Beam, Small Spot Option down to 100 μm, Higher Current Option up to 1 mA, Electrostatic Focus and Deflection, User Replaceable Firing Units, UHV compatible and bakeable, Computer / Remote Control, Beam Pulsing and Blanking Options.$

$Comparison table of Kimball Physics Medium Energy Electron Gun Systems (< 5 keV): EGG-3101 / EGPS-3101, EGG-3103 / EGPS-3103, EGF-3104 / EGPS-3104, EMG-4212 / EGPS-3212, EMG-4215 / EGPS-4215, EGF-4104 / EGPS-4104, EMG-4210 / EGPS-4210, EMG-4193 / EGPS-4193, and their applications and features. Medium energy systems, with energy ranges from 100 eV up to 30 keV, currents ranging from 1 nA to 5 mA, and spot sizes of 60 microns to 450 mm are available. EMG-4212 / EGPS-4212: Applications: MBE RHEED Studies, Electron Diffraction, Space Physics Studies, Gas Electron Fluorescence, X-ray Generation, Heating / Melting / Welding, Vacuum Physics Experiments. Features: 1 keV to 30 keV, Small Spot Collimated Beam, New Modular Design, Internal Alignment while operating, Collimated Beam, Small Spot Option down to 100 μm, Higher Current Option up to 1 mA, Electrostatic Focus and Deflection, User Replaceable Firing Units, UHV compatible and bakeable, Computer / Remote Control, Beam Pulsing and Blanking Options. EGF-4104 / EGPS-4104: Applications: Spacecraft Charge-up Studies, Surface Charging Studies, Beta Decay Stimulation, Surface Physics Studies, Vacuum Physics Experiments. Features: 200 eV to 30 keV, Energy Range: 200 eV to 30 keV, Beam Currents to 1 mA, Wide Angle Uniform Beam, Divergence Control, Rotatable 2 ¾ CF Mounting, User-Replaceable Firing Units, Computer / Remote Control, Custom Apertures. EMG-4210 / EGPS-4210: Applications: General Vacuum Physics, Radiation Studies, Surface Bombardment, Semiconductor Research, X-ray Generation, Plasma Excitation, Fluorescence Studies, Surface Physics Studies Features: 1 keV to 30 keV, Focusable, Spot Size down to 100 μm , Beam Currents up to 5 mA Magnetostatic Focusing, Optional Magnetostatic Beam Shaping, Magnetostatic Deflection, Pulse Capability, Internal Alignment while operating, User-replaceable Firing Units. EMG-4193 / EGPS-4193: Applications: Surface Physics, Vacuum Physics Experiments. Applications: 1 keV to 30 keV, Small Spot Size Electron Beams, New Modular Design, Photo Emission Option, Internal Alignment While Operating , Electrostatic Focusing, Quadrupole Alignment, Octopole Deflection / Raster / Stigmator , Beam Blanking , Inline Faraday Cup, Internal Magnetic Shielding, Differential pumping, Small Spot Down To 25 µm, Beam Current 1 nA to 10 uA, UHV Compatible / Bakeable, Computer /Remote Control, User-Replaceable Firing Units.$

High Energy Systems

High Energy Systems, with energy ranges from 1 keV up to 100 keV, currents ranging from 1 nA to 2 mA, and spot sizes from 50 micron to 500 mm are available.

The tables below provide comparison of the Electron Gun System specifications and the typical Applications and Features for each High Energy Electron Gun System.

High Energy Electron Gun Systems (< 100 keV)

High Energy Electron Gun System Specification Comparison Table, EGH-6210, EGH-6002, EGF-6104, EGH-8100, EGH-8105, EGH-8103, EGH-8201, Bean Energy Range, Beam Energy, Beam Current, Spot Size, Working Distance, Beam Uniformity

High energy systems, with energy ranges from 1 keV up to 100 keV, currents ranging from 1 nA to 2 mA, and spot sizes from 50 micron to 500 mm are available. Comparison table of Kimball Physics High Energy Electron Gun Systems (< 100 keV): EGH-6210 / EGPS-6210, EGH-6002 / EGPS-6002, EGF-6104 / EGPS-6104, EGF-6115 / EGPS-6115, EGH-8100 / EGPS-8100, EGH-8105 / EGPS-8105, EGH-8103 / EGPS-8103, and EGH-8201 / EGPS 8201, that includes their applications and features. EGH-6210 / EGPS-6210, Applications: General Vacuum Physics, Radiation Studies, Surface Bombardment, Semiconductor Research Biological Specimen Radiation, X-ray Generation, Plasma Excitation, Fluorescence Studies, Surface Physics Studies. Features:1 keV to 60 keV, Small Spot Size down to 50 μm, Medium Current Beams to 5 mA, High Current Beams to 10 mA, Magnetostatic Focusing, Magnetostatic Beam Shaping (optional), Magnetostatic Deflection, Pulse Capability, Internal Alignment while operation, User-Replaceable Firing Units. EGH-6002 / EGPS-6002, Applications: General Vacuum Physics, Radiation Studies, Surface Bombardment, Semiconductor Research, Biological Specimen Irradiation, X-ray Generation, Plasma Excitation, Fluorescence Studies, Surface Physics Studies. Features: 1 keV to 50 keV, Medium Beam Currents, Focusable Small Spot Sizes-Magnetostatic Focusing, Magnetostatic Deflection, Pulse Capability, Internal Alignment while Operating, User-Replaceable Firing Units, 4.5” or 6” in CFF Mounting, UHV Technology / Bakeable, Computer / Remote Control. EGF-6104 / EGPS-6104, Applications: Spacecraft Charge-up Studies, Surface Charging Studies, Beta Decay Simulation, Surface Physics Studies, Vacuum Physics Experiments. Features: 1 keV to 50 keV, Uniform Density Flood Beam, Energy Range: 1 keV to 50 keV, Beam Currents to 200 μA, High Current Option up to 1 mA , Wide Angle Uniform Beam , Divergence Control , Rotatable 2¾ inch CFF Mounting, Flange Multiplexer Flexibility, User-replaceable Firing Units, Computer / Remote Control. EGF-6115 / EGPS-6115, Applications: General Vacuum Physics, Spacecraft Materials Testing, UHV Charging, Surface Physics. Features: 1 keV to 50 keV, Uniform Flood Beam, Rastering / Beam Washing for Wide Angle , Uniform Spot Size, Electrostatic Divergence Control, Magnetostatic Deflection, Internal Alignment while Operating, User-Replaceable Firing Units, 2.75” in CF Mounting, UHV Technology / Bakeable, Computer / Remote Control, LabVIEWTM Computer / Programming.

Electron Gun Beam Systems Cathodes / Electron Emitters

Kimball Physics designs and manufactures a broad range of high performance electron emitters to meet the diverse needs of our customers. Designed for high brightness, long life, or rugged reliability, these emitters are used in Kimball Physics electron guns and the high performance instruments and tools of our customers. Cathodes/emitters are available as both standard products and custom designs, and applications include electron microscopy, lithography, x-ray generation, free electron lasers, electron accelerators, and more.

Not all cathodes are available for all Electron Gun Beam Systems. The selection of the cathode is based on several parameters such as expected vacuum conditions, energy spread, emission current and density, and brightness requirements. The chart below provides insight into the features of each of the cathode types available at Kimball Physics for use in our Electron Gun Beam Systems.

References

References, Notes, and Links

Electron Beam System Selection Guide: Summary Form PDF document to summarize your research looking for the Electron Gun Beam System for your application.

Tutorials and Overviews

Electron Gun (Beam) Systems

Electron Gun (Beam) Systems Product Documents (PDF)

Select PDF Document(s) below:

Low Energy Systems (<5 keV)

EFG-7 / EGPS-1017	EFG-7 / EGPS-2017	EGA-1012 / EGPS-1012
EGL-2022 / EGPS 2022	ELG-2 / EGPS-1022	FRA-2X1-2 / EGPS-1011

Medium Energy Systems (<30 keV)

EGG-3101 / EGPS-3101	EGG-3103 / EGPS-3103	EGF-3104 / EGPS-3104
EMG-4212 / EGPS-3212	EMG-4212 / EGPS-4212	EMG-4215 / EGPS-4215
EGF-4104 / EGPS-4104	EMG-4210 / EGPS-4210	EMG-4193 / EGPS-4193

High Energy Systems (< 100 keV)

EGH-6210 / EGPS-6210	EGH-6002 / EGPS-6002	EGF-6104 / EGPS-6104
EGF-6115 / EGPS-6115 (Please see EGF-6104)	EGH-8100 / EGPS-8100	EGH-8105 / EGPS-8105
EGH-8103 / EGPS-8103	EGH-8201 / EGPS-8201

Notes:

Charts /graphs show typical performance, data is for guidance only
It is not necessarily possible to achieve all maximum specifications simultaneously.
Specifications Subject to Change Without Notice
May not be up-to-date, with some systems no longer available.
DE Altobelli, 2/19/2025

Appendix

EG System	Cathode	Energy Dual Range	Emission Dual Range	Energy and Emission Dual Range	High Current	Deflection / Focus	Raster	Pulsing	De-mountable	Other Customizations
(1) FRA-2X1-2 /EGPS-1011: Tier 1	Ta, Y2O3									-Pneumatic Faraday Cup -FC 2×1 Manual Rotary Faraday Cup -Port Aligner (± 2 degree)
Tier 2	Ta, Y2O3			Dual-range Energy and Dual-range Emission DR-E/i (-1kV/-100V, 500uA/50uA)				GP – Dual-grid Pulsing
Tier 3	Ta, Y2O3	Dual-range Energy DR-E (-1kV/-100V),						CP – Capacitive Pulsing

(2) ELG-2 /EGPS-1022 Tier 1	Ta, Y2O3	Dual-range Energy DR-E (-2kV/-200V)				Defl – Electrostatic Deflection		CP – Capacitive Pulsing		-Manual Faraday Cup -FC-2/PA-200 Pneumatically Actuated Faraday Cup [mounted on housing] -Port Aligner (± 2 degree) -Software Raster Generator
Tier 2	Ta, Y2O3			Dual-range Energy and Dual-range Emission DR-E/i (-2kV/-200V, 20uA/2uA)		Defl – Electrostatic Deflection		GP – Dual-grid Pulsing CP – Capacitive Pulsing	Demountable
Tier 3	Ta, Y2O3			Dual-range Energy and Dual-range Emission DR-E/i (-2kV/-200V, 20uA/2uA)		Defl – Electrostatic Deflection		GP – Dual-grid Pulsing CP – Capacitive Pulsing	Demountable

(3) EFG-7 /EGPS-1017	Ta, Y2O3					Defl – Electrostatic Deflection				-Emission High/Low Range -Port Aligner(+/- 2 degrees) -Manual Faraday Cup -FC-2/PA-200 Pneumatically Actuated Faraday Cup -High Current (up to 1 mA) -Capacitive Pulsing (external Pulse generator required) -Software Raster -Hardware Raster
Tier 2	Ta, Y2O3	Dual-range Energy DR-E (-1.5kV/-150V)				Defl – Electrostatic Deflection		GP – Dual-grid Pulsing
Tier 3	Ta, Y2O3	Dual-range Energy DR-E (-1.5kV/-150V)				Defl – Electrostatic Deflection		GP – Dual-grid Pulsing	Demountable
EG System		Energy Dual Range	Emission Dual Range	Energy and Emission Dual Range	High Current	Deflection / Focus	Raster	Pulsing	De-mountable
(4) EGA-1012 /EGPS-1012	Y2O3									-Emission High / Low Range -Energy Low Range -Capacitive Pulsing -Port Aligner (+/- 2 degrees) -Dual Grid Pulsing

(5) EGL-2022 /EGPS-2022 Tier 1	Ta, Y2O3					Defl – Electrostatic Deflection				-Port Aligner (+/- 2 degrees) -Small Spot -Software Raster (requires LabVIEW) -Hardware Raster Generator
Tier 2	Ta, Y2O3			Dual-range Energy and Dual-range Emission DR-E/i (5kV/500V, 500uA/50uA)		Defl – Electrostatic Deflection		GP – Dual-grid Pulsing CP – Capacitive Pulsing
Tier 3	Ta, Y2O3						Raster	GP – Dual-grid Pulsing CP – Capacitive Pulsing

(6)EGG-3101 /EGPS-3101	Ta					Defl – Electrostatic Deflection				-Port Aligner (+/- 2 degrees) -Hardware Raster Generator -Dual Grid Pulsing 2us-DC -Software Raster (requires LabVIEW) -FC-2/PA-200 Pneumatically Actuated Faraday Cup [mounted on housing]
Tier 2	Ta, Y2O3					Defl – Electrostatic Deflection		CP – Capacitive Pulsing BB-Beam Planking
Tier 3	Ta		Dual-range Emission DR-i (2mA/200uA)		HC– High Current	Defl – Electrostatic Deflection		CP – Capacitive Pulsing BB-Beam Planking

(7) EGG-3103 /EGPS-3103- Tier 1	Y2O3									All options included in Tiers
Tier 2	Y2O3					Defl – Electrostatic Deflection
Tier 3	Y2O3				HC– High Current	Defl – Electrostatic Deflection		GP – Dual-grid Pulsing
EG System		Energy Dual Range	Emission Dual Range	Energy and Emission Dual Range	High Current	Deflection / Focus	Raster	Pulsing	De-mountable
(8) EGF-3104 /EGPS-3104: Tier 1	Ta									-Port Aligner (+/- 2 degrees) -Software Raster -Hardware Raster -Dual Grid Pulsing (2us-DC)
Tier 2	Ta					Mag Defl (x2)
Tier 3	Ta, Y2O3		Dual-range Emission DR-i (2mA/200uA)		HC– High Current	Mag Defl (x2)

(9) EMG-4212 /EGPS-4212: Tier 1	Ta, Y2O3		Dual-range Emission DR-i (500uA/50uA),			Defl – Electrostatic Deflection				-Software Raster (requires LabVIEW) -Hardware Raster -Beam Blanking -Small Spot Size -Capacitive Pulsing -High Current Option(up to 1 mA)
Tier 2	Ta, Y2O3					Defl – Electrostatic Deflection		GP – Dual-grid Pulsing
Tier 3	Ta		Dual-range Emission DR-i (500uA/50uA),			Defl – Electrostatic Deflection		BB Beam Dump

(10) EMG-4215 /EGPS-4215: Tier 1	LaB6					Defl – Electrostatic Deflection				-Software Raster (requires LabVIEW) -Hardware Raster
Tier 2	LaB6					Defl – Electrostatic Deflection		GP – Dual-grid Pulsing		-Software Raster (requires LabVIEW) -Hardware Raster

(11) EGF-4104 /EGPS-4104: Tier 1	Y2O3									-Port Aligner (+/- 2 degrees)
Tier 2	Y2O3					Mag Defl (x2)
Tier 3	Ta Y2O3				HC– High Current	Mag Defl (x2)		GP – Dual-grid Pulsing

(12) EMG-4210 /EGPS-4210: Tier 1	LaB6					Mag Defl (x2) & Lens				-Dual Grid Pulsing (2us-DC)
Tier 2	LaB6				HC– High Current	Mag Defl (x2) & Lens				-Dual Grid Pulsing (2us-DC)


EG System		Energy Dual Range	Emission Dual Range	Energy and Emission Dual Range	High Current	Deflection / Focus	Raster	Pulsing	De-mountable

(13) EGF-6104 /EGPS-6104 Tier 1	Y2O3					Mag Defl (x2)				-Port Aligner (+/- 2 degrees) -Software Raster -Hardware Raster -Dual Grid Pulsing (2us-DC)
Tier 2	Y2O3				HC– High Current	Mag Defl (x2)

(14)EGH-6210 EGPS-6210: Tier 1	LaB6					Mag Defl (x4)/Lens				-Port Aligner (+/- 2 degrees) -Beam Washing (Hardware, Software) -Beam Shaping (not compatible with beam washing)
Tier 2	LaB6		Dual-range Emission DR-i (10mA/1mA)			Mag Defl (x4)/Lens		GP – Dual-grid Pulsing
Tier 3	LaB6		Dual-range Emission DR-i (10mA/1mA)		HC– High Current	Mag Defl (x4)/Lens		GP – Dual-grid Pulsing

(15) EGH-6002 EGPS-6002	Ta					Mag Defl (x2)/Lens				-High Current Option (up to 1 mA) -Small Spot Option (LaB6, better than 10-7 torr)
	Ta (LaB6 small spot option)					Mag Defl (x2)/Lens		GP – Dual-grid Pulsing

*EGH-8100 EGPS-8100										Several options but not listed website options check boxes
*EGH-8103 EGPS-8103										-Dual Grid Pulsing (2us-DC) -High Current (up to 1 mA) -Small Spot Option (LaB6, 10-7 torr or better)
*EGH-8105 EGPS-8105										Several options but not listed website options check boxes
*EGH-8201 EGPS-8201										Several options but not listed website options check boxes

Electron Gun Beam Systems: Selection Guide

Table of Contents

Main

Introduction

Electron Gun Beam System Selection Guide

Procedure

Electron Gun (Beam) System Application Matrix:

Procedure:

Electron Gun Beam Systems Organized by Electron Energy (keV)

Low Energy Systems

Medium Energy Systems

High Energy Systems

Electron Gun Beam Systems Cathodes / Electron Emitters

References

References, Notes, and Links

Tutorials and Overviews

Appendix

QUICK LINKS

ABOUT

CONTACT

Electron Gun Beam Systems: Selection Guide

Table of Contents

Main

Introduction

Electron Gun Beam System Selection Guide

Procedure

Electron Gun (Beam) System Application Matrix:

Procedure:

FRA-2X1-2 / EGPS-1011: Features and Specs

ELG-2 / EGPS-1022: Features and Specs

EGA-1012 / EGPS-1012: Features and Specs

EFG-7 / EGPS-1017: Features and Specs

EFG-7 / EGPS-2017: Features and Specs

EGL-2022 / EGPS-2022: Features and Specs

EGG-3101 / EGPS-3101: Features and Specs

EGG-3103 / EGPS-3103: Features and Specs

EGF-3104 / EGF-3104: Features and Specs

EMG-4212 / EGPS-3212: Features and Specs

EMG-4212 / EGPS-4212: Features and Specs

EMG-4215 / EGPS-4215: Features and Specs

EGF-4104 / EGPS-4104: Features and Specs

EMG-4210 / EGPS-4210: Features and Specs

EMG-4193 / EGPS-4193: Features and Specs

EGH-6210 / EGPS-6210: Features and Specs

EGH-6002 / EGPS-6002: Features and Specs

EGF-6104 / EGPS-6104: Features and Specs

EGH-8100 / EGPS-8100: Features and Specs

EGH-8105 / EGPS-8105: Features and Specs

EGH-8103 / EGPS-8103: Features and Specs

EGH-8201 / EGPS-8201: Features and Specs

Electron Gun Beam Systems Organized by Electron Energy (keV)

Low Energy Systems

Medium Energy Systems

High Energy Systems

Electron Gun Beam Systems Cathodes / Electron Emitters

References

References, Notes, and Links

Tutorials and Overviews

Appendix