EGH-6002 / EGPS-6002

EGH-6002 / EGPS-6002



Starting price Basic System – options not included: $94,500

High energy, focusable beam with small spot size and adjustable beam alignment

Starting price Basic System – options not included: $94,500

High energy, focusable beam with small spot size and adjustable beam alignment

Categories: ,
Model #: EGH-6002 EGPS-6002


Focusable Small Spot Size, High Energy Electron Beams

1 keV to 50 keV


  • General Vacuum Physics
  • Radiation Studies
  • Surface Bombardment
  • Semiconductor Research
  • Biological Specimen Irradiation
  • X-ray Generation
  • Plasma Excitation
  • Fluorescence Studies
  • Surface Physics Studies

Features / Options:

  • Medium Beam Currents
  • Small Spot Sizes
  • Magnetostatic Focusing
  • Magnetostatic Deflection
  • Magnetic Lens
  • Pulse Capability
  • Internal Alignment while Operating
  • User-Replaceable Firing Units
  • 5” or 6.0” inch CF Mounting
  • UHV Technology / Bakeable
  • Computer / Remote Control

Energy Range: 1 keV to 50 keV
Beam Current: 10 nA to 100 µA
Spot size: 0.5 mm to 100 mm
Mounting: 4.5″ CF or 6.0″CF

The Kimball Physics EGH-6002 Electron Gun with its matching EGPS-6002 Power Supply is a complete subsystem ready to attach to the user’s vacuum system and turn on. It can deliver electrons over a very broad range of energies, currents, and power. The EGH-6002 can be used in many different applications from semiconductor research to secondary electron emission studies.

The gun can generate a high energy, focusable, small spot electron beam. Both beam energy and beam current are independently adjustable over wide ranges; energies from 1 keV to 50 keV and currents from 10nA to 100μA are standard. The electron beam can be pulsed by an input signal to the control grid.

The adjustable optics of the gun can adapt to different divergences and different working distances. The spot size can be varied from 0.5 mm to 10 cm. A magnetic focusing lens and magnetic centering deflection provide beam control with low aberration. In addition, the cathode to anode spacing is internally adjustable to change perveance.

The gun features an adjustable cathode feedthrough assembly that allows the mechanical alignment of the firing unit with respect to the anode and the column. This alignment can be done in real time while the gun is operating at full voltage with beam on. The firing unit cartridge (including the cathode, cathode-mount, and Wehnelt aperture) is user-replaceable without even removing the gun from the vacuum chamber. Used firing units may be returned to the factory for rebuild.

Additional information

Weight 5 lbs
Beam current max

Beam current min

Emphasized search terms

Energy range max

Energy range min

Features options select



Spot size max

Spot size min