Description
Energy Range: 1 keV to 20 keV
Beam current / Spot sizes:
Standard: 10 nA to 100 µA / Standard: 0.5 mm to 25 mm
Small Spot option: 1 nA to 10 µA / 100 µm to 10 mm
High Current option: 1 µA to 1 mA / High Current option: 1.5 mm to 25 mm
Mounting: 4½CF
Features / Options: Internal Alignment while Operating, Collimated Beam, Electrostatic Focusing and Deflection, Rastering, Pulsing, Blanking
