Description
Energy Range: 1 keV to 100 keV
Beam Current: 50 nA to 100 µA
Spot Size: 10 mm to 500+ mm
Mounting: 6CF
Features/Options: Adjustable Beam Alignment while Operating, Uniform Flood Beam, Beam Washing for Uniform Spot, Electrostatic Focusing, Magnetic Deflection, Pulsing, Rastering
