EGH-6210 / EGPS-6210

EGH-6210 / EGPS-6210



Starting price Basic System – options not included: $120,500

High energy gun with focusable beam and small spot size

Starting price Basic System – options not included: $120,500

High energy gun with focusable beam and small spot size

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Model #: EGH-6210 EGPS-6210


Focusable, High Energy Electron Beam, Small Spot Size to 50 μm

1 keV to 60 keV


  • General Vacuum Physics
  • Radiation Studies
  • Surface Bombardment
  • Semiconductor Research
  • Biological Specimen Radiation
  • X-ray Generation
  • Plasma Excitation
  • Fluorescence Studies
  • Surface Physics Studies

Features / Options:

  • Small Spot Size down to 50 μm
  • Medium Current Beams to 5 mA
  • High Current Beams to 10 mA
  • Magnetostatic Focusing
  • Magnetostatic Beam Shaping (optional)
  • Magnetostatic Deflection
  • Pulse Capability
  • Internal Alignment During Operation
  • Differential pumping

User-Replaceable Firing Units

Energy Range: 1 keV to 60 keV
Beam Current: 10 µA to 5 mA
Spot size: 50 µm to 10 mm
Mounting: 2.75″ (2¾) CF

The Kimball Physics EGH-6210 Electron Gun, with its matching EGPS-6210 Power Supply, is a complete subsystem ready to attach to the user’s vacuum system and turn on.  It can deliver electrons over a very broad range of energies, currents, and power. The EGH-6210 has applications in space materials testing, radiation studies, semiconductor research, x-ray generation and plasma excitation.

The gun uses a single-crystal lanthanum hexaboride (LaB6) cathode to generate a high energy, focusable, small spot electron beam. Both beam energy and beam current are independently adjustable over wide ranges; the energy from 1 keV to 60 keV, and current from 10 μA to 5 mA. The electron beam can be pulsed by an input signal to the control grid.

The adjustable optics of the gun can adapt to different divergences and a range of working distances, suitable to a variety of applications. The magnetic focusing lens can vary the spot size from 10 mm down to 50 μm. The magnetic centering and optional shaping coils provide additional beam control, allowing the user to deflect and shape the electron beam. Shaping typically results in an elliptical beam, both axes of which can be independently compressed or extended. The magnetostatic focusing lens and the deflection shaping quadrupole both produce results with low aberration. In addition, the cathode to anode spacing is internally adjustable to change perveance.

The gun features an adjustable cathode feedthrough assembly that allows the mechanical alignment of the firing unit with respect to the anode and the column. This alignment can be done in real-time while the gun is operating with beam on.

Additional information

Weight 5 lbs
Beam current max

Beam current min

Emphasized search terms

Energy range max

Energy range min


Spot size max

Spot size min