Focused or Uniform Wide-Angle Low-Energy Electron Beams
50 eV to 5 keV
- Surface Physics Studies
- Vacuum Physics Experiments
- Charge Neutralization
- Electron Desorption
- Surface Scrubbing
- Phosphor Testing
- Ionization Experiments
- Semiconductor Processing
Features / Options:
- Widely Controllable Parameters
- Flood Beams or Narrow Angle Beams
- Electrostatic Focusing
- Deflection, Rastering, Pulsing
- Demountable Gun
- Computer / Remote Control
Energy Range: 50 eV to 5k eV
Beam current: 1 nA to 100 µA
Spot Size: 1 mm to 100 mm
Mounting: 2.75″ (2¾”) CF, demountable option
Features/Options: Flood Beam or Narrow-Angle Beam, Electrostatic Focusing, Deflection, Rastering, Pulsing
The Kimball Physics EFG-7 Electron Gun, with its matching EGPS-2017 Power Supply, is intended for use in a variety of ultra-high vacuum (UHV) physics experiments, surface physics experiments, and processing applications. It is a complete subsystem ready to attach and turn on. Beam energy, beam current and spot size are independently adjustable over wide ranges.
The EFG-7 Electron Gun uses a refractory metal cathode to generate a uniform flood beam. The gun design allows for generation of the beam down to low energies, and very low currents. The 5 keV model EFG-7 produces a beam current of 1 nA to 100 μA and energies of 50 eV to 5 keV.
Centering deflection, rastering and pulsing are all available as options. Because the design has been optimized as a flood gun and uses a cylindrical 4-pole deflector, deflection aberrations can be severe when the beam is focused into a small spot.
UHV technology is used throughout. The gun can be run in vacuums from 10-11 torr up to 10-5 torr for the standard Ta disc cathode. The electron gun is bakeable to 350°C with cables removed.
Learn more by opening the detailed EFG-7 / EGPS-2017 PDF specification document in the Resource Tab above.