Description
Energy Range: 200 eV to 20 keV
Beam current / Spot sizes:
Standard: 1 nA to 100 µA / 15 mm to 50 mm
High Current: 10 nA to 1 mA / 15 mm to 50 mm
Mounting: 2¾CF
Features/Options: Adjustable Beam Alignment, Wide-Angle Uniform Beam, Divergence Control, Magnetic Deflection, Beam Washing, Custom Apertures, Pulsing, Dual Grid