Small Spot Collimated Beam, Alignment During Operation, Higher Current Option- up to 1 mA
100 eV to 10 keV
- General Vacuum Physics Experiments
- Space Physics Experiments
- Specimen Heating
- Electron Diffraction
- Phosphor Studies
- MBE RHEED Studies
Features / Options:
- New Modular Design
- Internal Alignment While Operating
- Collimated Beam
- Small Spot Option down to 60 μm
- Higher Current Option up to 1 mA
- Electrostatic Focus and Deflection
- Blanking, Pulsing, Rastering
- Rotatable 2.75” inch CF Mounting
- UHV Compatible and Bakeable
- Computer / Remote Control
- Flange Multiplexer Flexibility
- User-replaceable Firing Units
- Mounted Pneumatic Faraday Cup
Energy Range: 100 eV to 10 keV
Beam current / Spot size:
Standard: 10 nA to 100 µA / Standard: 0.5 mm to 25 mm
Small Spot option: 1 nA to 10 µA / 60 µm to 10 mm
High Current option: 1 µA to 1 mA / High Current option: 1.5 mm to 25 mm
Mounting: 2.75″ CF
The Kimball Physics EGG-3101 Electron Gun, with its matching EGPS-3101 Power Supply, is a multi-purpose modular Electron Gun with applications many areas. The EGG-3101 / EGPS-3101 is a complete subsystem ready to attach to a user’s vacuum system and turn on.
With a small spot option using a lanthanum hexaboride cathode, the gun can deliver spots down to 60 μm. With a high current option, beam currents up to 1 mA can be obtained.
The gun has the capability of producing a collimated small spot or a flood electron beam. Beam current, beam energy, and spot size are all independently adjustable over wide ranges. The energy can be varied from 100 eV to 10 keV. The beam current and spot size range depend on the system option as shown in the specifications table. Pulsing, beam blanking and rastering are also available as options.
The gun features an adjustable cathode feedthrough assembly that allows the mechanical alignment of the firing unit with respect to the anode and the column, in real time while the gun is operating at full voltage with beam on.
The modular design of the EGG-3101 allows either the firing unit assembly or the lens assembly to be replaced by the user. The firing unit (including the cathode, cathode-mount, and Wehnelt aperture) is user-replaceable without removing the gun from the vacuumchamber. The anode is also easily replaceable. In addition, the cathode to anode spacing is internally adjustable to change the space charge effect or perveance of the electron beam.