Description
Energy Range: 1 keV to 100 keV
Beam Current: 10 nA to 1 mA (pulsed beam up to 20 mA)
Spot Size: 3 mm to 100 mm
System Mounting Flange: 6CF
Turbo Pump Mounting Flange: 4½CF
Gauge Mounting Flanges: (3) 2¾CF
Features/Options: Internal Alignment while Operating, Flood Beam, Pulsing, High Current Pulsing
