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Electron Guns  / Power Supplies:  PRODUCT GUIDE


Model EMG-4215, 30keV Electron Gun mounted on a 41/2CF flange

Kimball Physics Electron Guns are designed for use in a wide variety of ultra high vacuum (UHV) surface physics, space physics, and processing applications.  The electron guns with their matching power supplies are complete subsystems ready to attach to a user-supplied vacuum system. A wide variety of models are available, from low-energy systems (5 eV-1000 eV)  to high-energy systems (1 keV-100 keV). Beams produced range from flood beams to focusable, small spots. Beam currents range from nanoamperes to tens of milliamperes. Miniature sizes are available.

Applications include: Surface physics (RHEED, ESD, IPES, LEED),  Space physics, Vacuum science, Accelerators / Free electron lasers, Electron lithography, X-ray generation, Charge neutralization, Semiconductor manufacturing equipment, Gas excitation, and Medical research.

Electron gun and power supply prices vary with the system configuration and options; please call or email Kimball Physics for a quotation.
 

FEATURES and OPTIONS on Various Electron Gun Systems
  • Independently adjustable beam energy, beam current. Spot size and deflection angle are also independently adjustable on focusable guns.
  • Excellent beam stability: Feedback-stabilized emission current control
    • over several orders of magnitude, ± 0.1% per hour
  • Energy Stability:  ± 0.01% per hour, ± 0.02% per 8 hours at full output.
  • Tracking: All operating parameters can be set to be proportional to other parameters, for example, Focus  can be set to vary with Energy to maintain spot size.
  • Storable control settings: Retrievable with a single Resume button.
  • Computer remote control / metering: LabViewTM, RS-232, or analog programming at ground potential.
  • Energy sweeping: Constant beam current can be maintained over a wide range of energy.
  • Mechanical alignment during full operation with beam and high voltage on
  • Fast pulsing / Beam blanking
  • Deflection / Rastering
  • Gun-mounted Faraday cups
  • Customer-replaceable firing units

     All options are not available on all gun systems.  See the Technical Notes for more information on these features and options.
 

 

NOTE:  It is not necessarily possible to achieve all maximum specifications simultaneously. For example, maximum beam current is typically not available at minimum energy;  minimum spot size is typically not available at longer working distances.
Specifications are subject to change without notice.

A typical Kimball Physics power supply with FlexPanel controller

Gun models in table are grouped in order of the energy (eV) produced.  Links to table below:
Lower Energy Electron Guns  up to 5keV
Mid Energy Electron Guns  10keV to 30keV
Higher Energy Electron Guns  50keV to 100keV
Power Supplies
 
Click on a photo for a larger view.
Click on an underlined gun model for its PDF specification pages.

 
     Lower-Energy Electron Gun Systems
ELG-2 Electron Gun (Electron Source)
ELG-2/ EGPS-1022

1eV to 2000eV 
New higher energy
Focusable, Zoom lens for energy sweeping
Beam: 1nA to 10µA
Constant current and approx. constant spot size over wide range in energy.
Spot size: 0.5 to 5mm
Deflection, Pulsing, Rastering
23/4CF Mounted, Demountable option
Mounted & unmounted FRA2X1-2 Electron Gun (Electron Source)
FRA-2X1-2 / EGPS-1011

5eV to 1000eV
Flood beam
Beam: 1nA to 400µA
100µA at 50eV
Spot size: 20mm at 50mm WD
Unmounted or CF Mounted
EGA-1106 Electron Gun (Electron Source)
EGA-1106 / EGPS-1106

100eV to 2000eV
Flood beam, High current
Beam: 1nA to 2mA
Spot: 20mm at 50mm WD
 11/3CF or 23/4CF Mounted or Unmounted
EFG-7 Electron Gun (Electron Source)
EFG-7 / EGPS-1017

50eV to 1500eV
Flood and Focusable
Beam current/ Spot sizes:
1nA to 100µA / 1 to 100mm
1nA to 1mA / 3 to 100mm
Deflection, Pulsing, Rastering
23/4CF Mounted, Demountable option
EFG-7 Electron Gun (Electron Source)
EFG-7 / EGPS-2017

100eV to 5000eV
Flood and Focusable
Beam current/ Spot sizes:
10nA to 100µA / 1 to 100mm
1µA to 1mA / 3 to 100mm
Deflection, Pulsing, Rastering
23/4CF Mounted
Demountable option
EGL-2022 Electron Gun (Electron Source)
EGL-2022 / EGPS-2022

50eV to 5000eV
Focusable, Zoom lens for energy sweeping
Beam: 1nA to 100µA
Spot sizes: 1 to 10mm
Deflection, Pulsing, Rastering
23/4CF Mounted
EGA-1108 Electron Gun (Electron Source)
EGA-1108 / EGPS-1108

50eV to 1000eV
Focusable
Beam: 1nA to 100µA
Spot size: 1 to 25mm
Deflection, Pulsing, Rastering
23/4CF Mounted, Demountable option

 

EGA-1012 / EGPS-1012

NEW 5eV to 1000eV
Flood beam
Beam: 1nA to 2mA
Spot size: 10 to 25mm
Pulsing, Dual Grid
23/4CF Mounted
CUSTOM ELECTRON GUN  and POWER SUPPLY DESIGNS

Kimball Physics designs completely new gun systems and also modifies existing designs to meet a wide variety of research and industry needs.
Consult the Kimball Physics Engineering Dept by phone or e-mail.

 

 
 

1 to 5 keV Power Supply with new  
     FlexPanel Controller (front view)  

  

POWER SUPPLIES with NEW  MODULAR DIGITAL ELECTRONICS

Power Supplies included with Electron Gun Systems  supply all voltages to drive a given electron gun: High voltage, Source, Grid, Focus, etc.  A new generation of compact power supplies, is being developed for all standard units.  All features of larger units (listed below) are available.
EGPS-2017 Power Supply with FlexPanel-back
(back view, with standard connectors) 
     Mid-Energy Electron Gun Systems
EGG-3101 / EGPS-3101

100eV to 10keV
New modular design,
Beam current/ Spot sizes:
10nA to 100µA / 0.5 to 25mm,
1nA to 10µA / 60µm to 10mm,
1µA to 1mA / 1.5 to 25mm
Various cathode types
Beam align adjustable
Deflection, Pulsing, Rastering, Blanking
 23/4CF Mounted
EGG-3103 Electron Gun (Electron Source)
EGG-3103 / EGPS-3103

100eV to 10keV
Focusable
Beam Current/ Spot size:
0.2 to 10mA / 1.5 to 20mm
5 to 50mA / 5 to 25mm 
Deflection, Rastering
23/4CF Mounted

EGF-3104 / EGPS-3104

NEW 200eV to 20keV
Flood beam
Beam current / Spot sizes:
Std:1nA to 100µA /15 to 50mm
HC: 10nA to 1mA / 15 to 50mm
Pulsing, Dual Grid
23/4CF Mounted
EMG-4212 Electron Gun (Electron Source)
EMG-4212 / EGPS-3212

1keV to 20keV
Beam current/ Spot sizes:
10nA to 100µA / 0.5 to 25mm,
1nA to 10µA / 100µm to 10mm
1µA to 1mA / 1.5 to 25mm
Various cathode types
Beam align adjustable feedthrough,
Pulsing, Deflection, Rastering
 41/2CF Mounted
EMG-4212 Electron Gun, 30keV
EMG-4212 / EGPS-4212

1keV to 30keV
New modular design,
Beam current/ Spot sizes:
10nA to 100µA / 0.5 to 25mm,
1nA to 10µA / 100µm to 10mm
1µA to 1mA / 1.5 to 25mm
Various cathode types
Beam align adjustable feedthrough,
Pulsing, Deflection, Rastering
 41/2CF Mounted

 
EMG-4103 Electron Gun, 30keV
EMG-4103 / EGPS-4103

1keV to 30keV
Focusable small spot column
Beam: 10nA to 1µA
Spot: 15 to 500µm
Alignment, Deflection Stigmator
Octopole rastering, Blanking
Inline Faraday cup, Differential pumping, Magnetic shielding
 41/2CF or 6CF Mounted
EMG-4215 / EGPS-4215

NEW  Focusable to 30keV
Beam: 1nA to 5mA
Spot size: 500µm to 25mm
Pulsing, Blanking
Rastering, Collimated beam
 41/2CF Mounted



10 keV Electron Gun system with Power Supplies and
National Instruments LabVIEWTM computer control.
     Higher-Energy Electron Gun Systems
EGH-6002 Electron Gun (Electron Source)
EGH-6002 / EGPS-6002

1keV to 50keV
Focusable, Magnetic lens
Beam: 10nA to 100µA
Spot size: 0.5 to 100mm
Pulsing, Magnetic deflection
 41/2CF or 6CF Mounted
EGH-6005 ELECRON GUN (Electron Source)
EGH-6005 / EGPS-6005

1keV to 50keV
Focusable flood beam
Beam: 1nA to 5mA
Spot size:10 to 500mm
6CF Mounted
EGF-6104 / EGPS-6104

NEW  1keV to 50keV
Uniform density flood beam
Beam current / Spot sizes:
Std:1nA to 200µA /15 to 50mm
HC: 10nA to 1mA / 15 to 50mm
 23/4CF Mounted
EGH-6210 / EGPS-6210

NEW  1keV to 60keV
Focusable, Magnetic lens
Beam: 10µA to 6mA
Spot size: 50µm to 10mm
Differential pumping, Pulsing
Mag. deflection
Beam stigmation
EGH-8101 Electron Gun (Electron Source)
EGH-8101 / EGPS-8101

10keV to 100keV
Flood beam
Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 3 to 100mm
23/4CF, 41/2CF, or 6CF Mounted
EGH-8103 Electron Gun (Electron Source)
EGH-8103 / EGPS-8103

10keV to 100keV
Focusable, Magnetic lens
Beam current/ Spot sizes:
10nA to 1mA / 500µm to 10mm
10nA to 100µA / 60µm to 10mm
Pulsing, Magnetic deflection
6CF Mounted
EGH-8105 / EGPS-8105

 1keV to 100keV
Focusable flood beam
Beam: 50nA to 100µA
Spot size: 10 to 500+ mm
Beam washing for uniformity
Pulsing
6CF Mounted
EGH-8201 Electron Gun (Electron Source)
EGH-8201 / EGPS-8201

10keV to 100keV
Focusable, Magnetic lens
Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 1 to 100mm
Magnetic deflection,
Differential pumping,
6CF Mounted
EGH-8202 Electron Gun (Electron Source)
EGH-8202 / EGPS-8202

10keV to 100keV
Focusable 2 lens system
Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 1mm to 15mm
Magnetic deflection,
Differential pumping, gate valve
6CF Mounted
EGH-8102 100keV system with LabVIEW computer control
High Energy Electron Gun system with Power Supplies and
National Instruments LabVIEWTM computer control.

 

 
Electron Gun Power Supplies
 

 

POWER SUPPLIES with
NEW  MODULAR DIGITAL ELECTRONICS

Power Supplies included with Electron Gun Systems
supply all voltages to drive a given electron gun: High voltage, Source, Grid, Focus, etc.
See electron gun for power supply specifications.  A new generation of power supplies is being developed for all standard units.  Features include:
  FlexPanel controller
  Digital fluorescent panel display with keypad
  Miniaturized floating power supply clusters
  Optical isolated control
  EMI resistant
  Independently adjustable beam energy, beam current, spot size and  deflection angle
  Feedback stabilized emission current control over several orders of magnitude, ± 0.1% per hour
  Storable parameter settings, retrievable with single button
  Computer remote control and metering, with rear panel connectors: analog inputs/outputs at ground potential and RS-232 serial interface (RS-422/RS-485 available)
  LabVIEWTM computer programs available
  Deflection, electrostatic or magnetic
  Beam pulsing or blanking
  Raster generation
  CE compliant and SEMI S2&S8 designs available

 

10 keV Power Supply with new FlexPanel Controller (front view)
EGPS-3101 Power Supply with FlexPanel controller, back view
(back view , with standard computer/remote control connectors)

Underlined gun models link to PDF specification pages.
If you need a PDF reader, click the Adobe logo to download it now.

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