Quick Overview
100eV to 10keV
Beam current/ Spot sizes:
10nA to 100µA / 0.5 to 25mm,
1nA to 10µA / 60µm to 10mm,
1µA to 1mA / 1.5 to 25mm
Beam align adjustable while operating
Deflection, Pulsing, Rastering, Blanking
2¾CF Mounted
Download Specifications