Medium Energy (30 keV max)

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Mid-Energy Electron Gun Systems (30 keV Max)

Gun Model

Key Characteristics

Energy Range

Beam Current 

Spot Size (mm)

Features / Options 

EGG-3101*

Small Spot Collimated Focusable Beam, Modular Gun

100eV to 10keV

1nA to 100μA

0.06 to 10

Internal Alignment while Operating, Collimated Beam, Electrostatic Focusing & Deflection, Blanking, Pulsing, Rastering,Optional Faraday Cup

10nA to 10μA

0.5 to 25

1μA to 1mA

1.5 to 25

EGG-3103

Focusable Electron Beams, High Current Option up to 50 mA

100eV to 10keV

0.2mA to 10mA

1.5 to 20

Focusing, High Current, Deflection, Rastering

5mA to 50mA

5 to 25

EGF-3104

Uniform Wide-Angle Flood Gun

200eV to 20keV

1nA to 100μA

15 to 50

Adjustable Beam Alignment, Wide Angle Uniform Beam, Divergence Control, Magnetic Deflection, Beam Washing, Custom Apertures

10nA to 1mA

15 to 50

EMG-4212 / EGPS-3212

Small Spot Collimated Focusable Beam, Modular Gun - Energy up to 20 keV

1keV to 20keV

1nA to 10μA

0.1 to 10

Modular Design, Internal Alignment while Operating, Collimated Beam, Electrostic Focusing & Deflection, Rastering, Pulsing, Blanking

10nA to 100μA

0.5 to 25

1μA to 1mA

1.5 to 25

EMG-4212 / EGPS-4212

Small Spot Collimated Focusable Beam, Modular Gun - Energy up to 30 keV

1keV to 30keV

1nA to 10μA

0.1 to 10

Modular Design, Internal Alignment while Operating, Collimated Beam, Electrostic Focusing & Deflection, Rastering, Pulsing, Blanking

10nA to 100μA

0.5 to 25

1μA to 1mA

1.5 to 25

EMG-4103

Versatile, Option Laden,  Medium Energy Gun with Small Spot Size Capability

1keV to 30keV

10nA to 1μA

0.015 to 0.5

Small Spot, Modular Design, Internal Alignment while Operating, Quadrupole Alignment, Octopole Deflection, Raster, Stigmator, Blanking, In-Line Faraday Cup, Internal Magnetic Shielding, Differential Pumping

EMG-4215

Versatile, Modular Medium Energy, Focusing & Flood Gun

1keV to 30keV

1nA to 5mA

0.5 to 25

Modular Design, Internal Alignment while Operating, Electrostatic Focusing & Deflection

* Has different ranges of spot size vs current