Low Energy (5 keV max)

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Low Energy Electron Gun Systems (5 keV Max)

Gun Model

Key Characteristics

Energy Range

Beam Current

Spot Size (mm)

Features / Options

ELG-2

Constant Beam Current & Spot Size over Broad Energy Range

1 eV to 2keV

1nA to 10μA

0.5 to 5

Zoom Lens Focusing for Energy Sweeping, Demountable Gun, High Speed Pulsing, Deflection, Rastering

FRA-2X1-2

Compact, Wide-Angle Beam

5eV to 1keV

1nA to 400μA

20 to 50

Flood Beam, Variable Mounting Configurations, Pulsing Options

 EGA-1012

High Current,
Medium Diameter
Spot Size

 5eV to 1keV

 1nA to 2mA

 10 to 25

 Flood Beam, Compact design, pulsing

EFG-7, EGPS-1017

Focused or Uniform Wide-Angle

50eV to 1.5keV

1nA to 100μA

1 to 100

Flood Beam or Narrow Angle Beam, Electrostatic Focusing, Deflection, Rastering, Pulsing, Demountable

1nA to 1mA

3 to 100

EFG-7, EGPS-2017

Focused or Uniform Wide-Angle

100eV to 5keV

10nA to 100μA

1 to 100

Flood Beam or Narrow Angle Beam, Electrostatic Focusing, Deflection, Rastering, Pulsing, Demountable

 1μA to 1mA

3 to 100

EGL-2022

Energy Sweeping: Constant Beam Current and Spot

50eV to 5keV

1nA to 100μA

1 to 10

Zoom Lens Focusing for Energy Sweeping, High Speed Pulsing, Deflection, Rastering