High Energy (100 keV max)

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High-Energy Electron Gun Systems (100 keV Max)

Gun Model

Key Characteristics

Energy Range 

Beam Current 

Spot Size (mm)

Features / Options 

EGH-6002

Focusable, Small Spot Gun

1keV to 50keV

10nA to 100μA

0.5 to 100

Magnetostatic Focusing and Deflection, Pulsing, Internal Alignment while Operating

EGH-6115

Focusable, Flood Gun

1keV to 50keV

1nA to 5mA

10 to 500

Magnetostatic Deflection and Rastering, Electrostatic Focusing, Internal Alignment while Operating

EGF-6104

Uniform Density Flood Beam Gun

1keV to 50keV

1nA to 200μA

15 to 50

Adjustable Beam Alignment while operating, Wide Angle Uniform Beam, Divergence Control, Magnetic Deflection, Beam Washing, Custom Apertures

10nA to 1mA

15 to 50

EGH-6210

Focusable, Small Spot to 50 μm

1keV to 60keV

10μA to 6mA

0.05 to 10

Magnetostatic Focusing/Beam Shaping, Magnetostatic Deflection, Internal Alignment while Operating,  Differential Pumping

EGH-8100

Medium Spot, Flood Gun

10keV to 100keV

10nA to 1mA

3 to 100

Flood Beam, Pulsing, Internal Alignment while Operating

EGH-8103

Focusable, Small Spot Option to 60 μm

10keV to 100keV

10nA to 1mA

0.5 to 10

Magnetostatic Focusing, Magnetostatic Deflection, Pulsing, Adjustable Alignment while Operating

10nA to 100μA

0.06 to 10

EGH-8105

Focusable, Flood Gun

1keV to 100keV

50nA to 100μA

10 to 500

Uniform Flood Beam, Beam Washing for Uniform Spot, Electrostatic Focusing, Adjustable Beam Alignment while Operating, Pulsing, Magnetic Deflection

EGH-8201

Focusable, High Currents up to 20 mA Pulsed

10keV to 100keV

10nA to 1mA      Pulsed to 20mA

1 to 100

Magnetostatic Focusing, Magnetostatic Deflection, Pulse Capability, Internal Alignment while Operating

EGH-8202

Two Lens System, High Currents up to 20 mA pulsed, Modular Design

10keV to 100keV

10nA to 1mA      Pulsed to 20mA

1 to 100

Magnetostatic Focusing (Two-Lens System), Magnetostatic Deflection, Pulse Capability, Differential Pumping and Optional Gate Valve